2022-09-21 10:59 Status: # Etching ## Plasma Etch Ionised etching material - then add an electric field to bombard the wafer (protecting parts with the photoresist).  You can etch away very steep walls (also need a selective [etchant](etchant.md) so it stops at, say, the wafer). [Anisotropic etch](Anisotropic%20etch.md) which is materially selective. [^1] --- # References [^1]: [vr-4602-wk01-sc05-etching](../../Spaces/University/ELEC4602%20–%20Microelectronics%20Design%20and%20Technology/Lectures/W1/vr-4602-wk01-sc05-etching.mp4)